Site-Selective Atomic Layer Precision Thinning of MoS2 via Laser-Assisted Anisotropic Chemical Etching
| Autor: | Matthew Eliceiri, Jiayun Pei, Yoonsoo Rho, Zhengliang Su, Costas P. Grigoropoulos, Letian Wang |
|---|---|
| Rok vydání: | 2019 |
| Předmět: |
Materials science
Thinning business.industry 02 engineering and technology 010402 general chemistry 021001 nanoscience & nanotechnology Laser assisted 01 natural sciences Isotropic etching 0104 chemical sciences Transition metal Site selective Optoelectronics General Materials Science 0210 nano-technology business Anisotropy Layer (electronics) |
| Zdroj: | ACS Applied Materials & Interfaces. 11:39385-39393 |
| ISSN: | 1944-8252 1944-8244 |
| DOI: | 10.1021/acsami.9b14306 |
| Popis: | Various exotic optoelectronic properties of two-dimensional (2D) transition metal dichalcogenides (TMDCs) strongly depend on their number of layers, and typically manifest in ultrathin few-layer or... |
| Databáze: | OpenAIRE |
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