Effect of tail time of discharge current on film properties in diamond-like carbon deposition by high-frequency inclusion high-power impulse magnetron sputtering
Autor: | Hiroyuki Fukue, Tatsuyuki Nakatani, Tadayuki Okano, Masahide Kuroiwa, Shinsuke Kunitsugu, Hiroki Oota, Ken Yonezawa |
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Rok vydání: | 2023 |
Předmět: | |
Zdroj: | Diamond and Related Materials. 135:109868 |
ISSN: | 0925-9635 |
Databáze: | OpenAIRE |
Externí odkaz: |