Piezoelectric Deactuation-Based Bi-Stable MEMS Switch: MEM-Z NVM

Autor:	Dhairya Singh Arya, Sushil Kumar, Pushpapraj Singh, Manu Garg
Rok vydání:	2021
Předmět:	Microelectromechanical systems Fabrication Materials science business.industry Mechanical Engineering Context (language use) Piezoelectricity Non-volatile memory Mechanical system Bi stable Optoelectronics Electrical and Electronic Engineering business Electrical impedance
Zdroj:	Journal of Microelectromechanical Systems. 30:683-685
ISSN:	1941-0158 1057-7157
Popis:	This letter proposes a bi-stable microelectromechanical impedance (MEM-Z) based non-volatile memory (NVM) element. The MEM-Z NVM cell has two stable impedance states. In context to bi-stable mechanical systems, the MEM-Z cell has a novel de-actuation mechanism. The MEM-Z shows ~20 times decrease in impedance from Off-state (logic-0) to On-state (logic-1). The letter also summarizes the fabrication and the design guidelines for the bi-stable MEM-Z NVM. Furthermore, the fabrication of the MEM-Z is important, because the bi-stability is the fine-play of locking of micro-ball ( $\mu $ -ball) and micro-socket ( $\mu $ -socket). The prototype bi-stable MEM-Z NVM is the first of its kind, and the reported fabrication is CMOS compatible. The device is tested in a vacuum for its operability and bi-stability. [2021-0135]
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7bb8b9f625f826cb5df49bfaa4923213 https://doi.org/10.1109/jmems.2021.3104039 Zobrazit plný text záznamu