Mechanical properties of Al/Al2O3 nanolaminated films: correlation to microstructure
| Autor: | Philippe Houdy, P. Aubert, M. Ben Daia, Sid Labdi, Jean-Luc Bozet, C. Le Paven-Thivet |
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| Rok vydání: | 2000 |
| Předmět: |
Materials science
Silicon Metallurgy chemistry.chemical_element Surfaces and Interfaces General Chemistry Substrate (electronics) Nanoindentation Tribology Condensed Matter Physics Microstructure Surfaces Coatings and Films Metal chemistry visual_art Materials Chemistry visual_art.visual_art_medium Ceramic Composite material Reflectometry |
| Zdroj: | Surface and Coatings Technology. 125:196-200 |
| ISSN: | 0257-8972 |
| Popis: | Wear resistance and the hardness of Al/Al 2 O 3 nanolaminated films were investigated in this study. Monolithic films and multilayers were deposited on a silicon substrate with two different substrate temperatures: T s =25°C and T s =-90°C. The period thickness of multilayers was lowering from 40 to 2 nm. From nanoindentation measurements, it appears that the hardness of multilayers has an intermediate value between those of metal (Al) and ceramic (Al 2 O 3 ). The tribological test was conducted by the pin-on-disc method. The T s =25°C deposited multilayers, as well as single films, demonstrated poor wear resistance. The best wear resistance was obtained for multilayers deposited at the lowest substrate temperature (T s =-90°C). The results are in good agreement with structural characterization. X-ray reflectometry demonstrated that the multilayer character of Al/Al 2 O 3 is more pronounced for T s =-90°C. |
| Databáze: | OpenAIRE |
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