Plasma ion-beam 3D printing: A novel method for rapid fabrication of customized MEMS sensors
| Autor: | Yasuhiko Sugiyama, Misuzu Sagawa, Hideaki Kurata, Morishita Masatoshi, Shuntaro Machida, Kinoshita Masaharu, Hiroshi Oba, Matsui Ryohei, Daisuke Ryuzaki, Toshiyuki Mine, Watanabe Keiji, Nobuyuki Sugii, Koji Fujisaki, Shinji Nishimura |
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| Rok vydání: | 2018 |
| Předmět: |
Microelectromechanical systems
0209 industrial biotechnology Materials science Fabrication Ion beam business.industry Capacitive sensing Process (computing) 3D printing 02 engineering and technology 01 natural sciences Focused ion beam 010309 optics 020901 industrial engineering & automation Etching 0103 physical sciences Optoelectronics business |
| Zdroj: | 2018 IEEE Micro Electro Mechanical Systems (MEMS). |
| DOI: | 10.1109/memsys.2018.8346588 |
| Popis: | This paper reports a novel method that reduces fabrication period of customized MEMS sensors. A 3D printing method with a high-current plasma focused ion beam (FIB) system was developed and applied to MEMS sensor fabrication for the first time. Capacitive MEMS vibration sensors fabricated using the conventional lithography process and the 3D printing process were compared. The difference in the resonance frequency was as small as 4%. Compared to the conventional process, the 3D printing process reduced the fabrication period by ∼80%. |
| Databáze: | OpenAIRE |
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