Hybrid Numerical Simulation of Micro Electro Mechanical Systems

Autor:	Wolfgang Mathis, M. Greiff, Uzzal Binit Bala
Rok vydání:	2006
Předmět:	Microelectromechanical systems Materials science Computer simulation Electrostatic force microscope Mechanical engineering
Zdroj:	PIERS Online. 2:270-274
ISSN:	1931-7360
DOI:	10.2529/piers050907123514
Popis:	In this paper a hybrid numerical approach for the simulation of micro electro mechanical systems (MEMS) is presented. A simulation model that takes into account the mechanical and the electrical effects is developed. The model is applied to an electrostatic force microscope (EFM) and simulation results are presented.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7b8e09477480cd15dd2895390bc70bb9 https://doi.org/10.2529/piers050907123514 Zobrazit plný text záznamu