Comparing Deposition Properties in an Atmospheric Pressure Plasma System Operating in Uniform and Nonuniform Modes

Autor:	Denis P. Dowling, Lucas Schaper, Gerry Byrne, Liam O'neill, Alan Michael Hynes, D. Della Croce, Barry Twomey, William Graham
Rok vydání:	2009
Předmět:	Nuclear and High Energy Physics Materials science Atmospheric pressure chemistry.chemical_element Atmospheric-pressure plasma Plasma Dielectric Dielectric barrier discharge Condensed Matter Physics Tetraethyl orthosilicate chemistry.chemical_compound chemistry Composite material Thin film Helium
Zdroj:	IEEE Transactions on Plasma Science. 37:961-969
ISSN:	1939-9375 0093-3813
Popis:	A large-scale atmospheric pressure plasma has been generated in helium, and the time-resolved optical and electrical properties have been shown to produce a homogeneous dielectric barrier discharge. Introducing tetraethyl orthosilicate as a liquid aerosol into this plasma produced clear, uniform, and smooth plasma polymerized coatings. Optical imaging studies have shown that adding 1% oxygen to the gas mixture induced a switch from a homogeneous plasma to a filamentary or microdischarge mode of operation, and this has been shown to dramatically alter the morphology of the deposited coatings. Surface analysis reveals significant particulate inclusions in coatings deposited from the filamentary mode of operation.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7b12945f045705a04fd8ec219cdbb675 https://doi.org/10.1109/tps.2009.2015226 Zobrazit plný text záznamu