Measurement of Interstitial Oxygen Striations in Silicon Single Crystals Using the Micro-FTIR Method

Autor:	E. Iino, I. Fusegawa, Hirotoshi Yamagishi
Rok vydání:	1993
Předmět:	Crystallography Materials science Chemical engineering Silicon chemistry Mechanics of Materials Mechanical Engineering chemistry.chemical_element General Materials Science Fourier transform infrared spectroscopy Condensed Matter Physics Oxygen
Zdroj:	Materials Science Forum. :189-194
ISSN:	1662-9752
DOI:	10.4028/www.scientific.net/msf.117-118.189
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7b062308d8bff3b47737b916b799db15 https://doi.org/10.4028/www.scientific.net/msf.117-118.189 Zobrazit plný text záznamu