Guided-wave optics in silicon-on-insulator technology

Autor: F. Coppinger, P.D. Trinh, Bahram Jalali, S. Yegnanarayanan
Rok vydání: 1996
Předmět:
Zdroj: IEE Proceedings - Optoelectronics. 143:307-311
ISSN: 1359-7078
1350-2433
DOI: 10.1049/ip-opt:19960675
Popis: Silicon-on-insulator (SOI) technology offers tremendous potential for the integration of optoelectronic functions on a silicon substrate. The authors have demonstrated integrated 3 dB optical directional couplers, a 5/spl times/9 star coupler, and a Mach-Zehnder wavelength demultiplexer using SOI rib waveguides. These devices show excellent performance characteristics and represent key components for the realisation of monolithic optoelectronic circuits in a silicon IC-compatible technology.
Databáze: OpenAIRE