A qualitative and quantitative study of the oxides of aluminum and silicon using AES and XPS

Autor: David Lichtman, J.A. Kovacich
Rok vydání: 1985
Předmět:
Zdroj: Journal of Electron Spectroscopy and Related Phenomena. 35:7-18
ISSN: 0368-2048
DOI: 10.1016/0368-2048(85)80038-4
Popis: Experimental AES and XPS results from powdered α-Al2O3, SiO2, Al2Si2O7·2H2O and an aluminosilicate glass are presented. The AES kinetic energy and the XPS binding energy values of core-level states and the peak shapes of X-ray induced O KLL Auger transitions are presented as qualitative reference data for the purpose of aiding in the identification of unknown aluminum oxide/silicon oxide samples. The AES peak-to-peak heights and the XPS peak areas of core-level states are presented as quantitative data and are used in the calculation of empirical relative sensitivity factor values. In addition, the sensitivity factor values are given parameters according to a single variable, f8, defined as the ratio of the volume density of the oxygen atoms to the sum of the volume densities of the aluminum and silicon atoms.
Databáze: OpenAIRE