MEMS devices based on self-organizing semiconductors structures

Autor:	Mark A. Denisenko, Alina S. Isaeva, Igor E. Lysenko, Alexey V. Tkachenko
Rok vydání:	2022
Zdroj:	International Conference on Micro- and Nano-Electronics 2021.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7ae40a5147a1f31d503641a3267171ae https://doi.org/10.1117/12.2624592 Zobrazit plný text záznamu