Impact of process variations on splitter-tree-based integrated optical phased arrays

Autor:	Zhengxing Zhang, Milica Notaros, Zhengqi Gao, Uttara Chakraborty, Jelena Notaros, Duane S. Boning
Rok vydání:	2023
Předmět:	Atomic and Molecular Physics and Optics
Zdroj:	Optics Express. 31:12912
ISSN:	1094-4087
DOI:	10.1364/oe.487096
Popis:	We consider the impact of intra-wafer systematic spatial variation, pattern density mismatch, and line edge roughness on splitter-tree-based integrated optical phased arrays. These variations can substantially affect the emitted beam profile in the array dimension. We study the effect on different architecture parameters, and the analysis is shown to be consistent with experimental results.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7ab33cdd4508920784785b8a9fd189cd https://doi.org/10.1364/oe.487096 Zobrazit plný text záznamu