Thermodynamic processes on a semiconductor surface during in‐situ multi‐beam laser interference patterning
| Autor: | Si Chen, Henry Francis, Mark Hopkinson, Chih-Hua Ho, Yun-Ran Wang, Chao-Yuan Jin |
|---|---|
| Rok vydání: | 2019 |
| Předmět: |
Surface diffusion
Work (thermodynamics) Materials science business.industry 02 engineering and technology Photothermal therapy Interference (wave propagation) 01 natural sciences Atomic and Molecular Physics and Optics Gallium arsenide 010309 optics chemistry.chemical_compound 020210 optoelectronics & photonics Semiconductor chemistry 0103 physical sciences Thermal 0202 electrical engineering electronic engineering information engineering Optoelectronics Electrical and Electronic Engineering business Thermodynamic process |
| Zdroj: | IET Optoelectronics. 13:7-11 |
| ISSN: | 1751-8776 |
| DOI: | 10.1049/iet-opt.2018.5028 |
| Popis: | Laser interference has been widely used to produce one-dimensional gratings and more recently has shown great potential for two-dimensional patterning. In this study, the authors examine by simulation, its application to in-situ patterning during materials growth. To understand the potential, it is important to study the surface processes resulting from the laser–matter interaction, which have a key influence on the resulting growth mechanisms. In this work, the intensity distribution and the laser–semiconductor interaction resulting from four-beam interference patterns are analysed by numerical simulations. In particular, the authors derive the time and spatially dependent thermal distribution along with the thermal-induced desorption and surface diffusion. The results provide a crucial understanding of the light-induced thermal profile and show that the surface temperature and the surface adatom kinetics can be controlled by multi-beam pulsed laser interference patterning due to photothermal reactions. The approach has potential as an in-situ technique for the fast and precise nanostructuring of semiconductor material surfaces. |
| Databáze: | OpenAIRE |
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