Structural Analysis of ZnO Film Deposited by Means of Metal Organic Decomposition Method

Autor:	Masato Ohmukai, Nobutomo Uehara, Masaru Kamano, Takuya Nakagawa
Rok vydání:	2014
Předmět:	Metal Diffraction Film structure Materials science Annealing (metallurgy) visual_art visual_art.visual_art_medium Analytical chemistry Decomposition method (queueing theory) X ray analysis Line width
Zdroj:	Journal of Materials Science and Chemical Engineering. :41-48
ISSN:	2327-6053 2327-6045
DOI:	10.4236/msce.2014.211006
Popis:	ZnO films were deposited on glass substrates by means of a metal organic decomposition (MOD) method. We investigated the effect of annealing temperature, time and the number of laminated layers on the film structure on the basis of X-ray diffraction measurements. We found the optimum conditions of the temperature and the time to be 600°C and 40 minutes for the preparation, respectively. In addition, the layer-by-layer forming was not found to degrade the film from viewpoint of X-ray line width.
Databáze:	OpenAIRE
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