In situ seeding of high Z elements with glow discharge polymerized organic coatings

Autor:	R. L. Nolen, L. B. Kool, R. L. Crawley
Rok vydání:	1981
Předmět:	chemistry.chemical_classification Glow discharge Materials science General Engineering Analytical chemistry Chemical vapor deposition Polymer engineering.material Surface coating Coating chemistry Sputtering Halogen engineering Deposition (law)
Zdroj:	Journal of Vacuum Science and Technology. 18:1255-1257
ISSN:	0022-5355
DOI:	10.1116/1.570907
Popis:	Currently favored IF target designs include low Z coatings seeded with small amounts of high Z elements. A method for incorporating high Z elements into glow discharge polymerized (GDP) coatings is being investigated. In this method we have substituted an iodine atom onto the p‐xylene molecule prior to GDP deposition. Chemical analysis, IR, and NMR of the resultant coating indicates up to 7 at.% incorporation of chemically bound iodine. Metallic sputter/GDP codeposition has been reported1, and is being installed in our latest deposition system.
Databáze:	OpenAIRE
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