Structure, electrical and gas sensor properties of Sn-Y-O thin films, prepared by reactive ion-beam sputtering

Autor:	A. V. Sitnikov, I. V. Babkina, Yu. Ye. Kalinin, V. A. Makagonov, O. V. Zhilova, O. I. Remizova
Rok vydání:	2018
Předmět:	010302 applied physics Materials science Ion beam sputtering Chemical engineering 0103 physical sciences General Materials Science 02 engineering and technology Thin film Conductivity 021001 nanoscience & nanotechnology 0210 nano-technology Tin oxide 01 natural sciences
Zdroj:	Letters on Materials. 8:196-201
ISSN:	2410-3535 2218-5046
DOI:	10.22226/2410-3535-2018-2-196-201
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7a3da502b3f37b66b1c1cc10361a63b2 https://doi.org/10.22226/2410-3535-2018-2-196-201 Zobrazit plný text záznamu