Surface passivation of GaAs by ultra-thin cubic GaN layer

Autor: Hideki Hasegawa, Tamotsu Hashizume, S Sanguan Anantathanasarn, Shinya Ootomo
Rok vydání: 2000
Předmět:
Zdroj: Applied Surface Science. :456-461
ISSN: 0169-4332
DOI: 10.1016/s0169-4332(00)00077-5
Popis: Attempts were made to passivate the GaAs (001) surface by a pseudomorphic ultra-thin cubic GaN layer formed by a nitrogen radical (N-radical) or nitrogen plasma irradiation technique. Reflection high-energy electron diffraction (RHEED) pattern observations and detailed X-ray photoelectron spectroscopy (XPS) analysis have shown that ultra-thin cubic GaN layer on GaAs (001) surface with desirable surface stoichiometry can be realized with the optimization of surface nitridation process parameters. The passivation effects, characterized by ultra-high vacuum photoluminescence (UHV PL) analysis, revealed strong enhancement in band-edge PL intensity of GaAs after passivation as large as a factor of 10 when compared with the as-grown clean molecular beam epitaxy (MBE) GaAs surface.
Databáze: OpenAIRE