Study of the structure and dielectric properties of gradient lead zirconate-titanate thin films
| Jazyk: | ruština |
|---|---|
| Rok vydání: | 2021 |
| Předmět: | |
| DOI: | 10.18720/spbpu/3/2021/vr/vr21-5308 |
| Popis: | ÐеÑодом вÑÑокоÑаÑÑоÑного магнеÑÑонного ÑаÑпÑÐ»ÐµÐ½Ð¸Ñ Ð¸Ð·Ð³Ð¾ÑÐ¾Ð²Ð»ÐµÐ½Ñ ÑонкопленоÑнÑе ÑегнеÑоÑлекÑÑиÑеÑкие двÑÑ ÑлойнÑе ÑÑÑÑкÑÑÑÑ ÑиÑконаÑа-ÑиÑанаÑа ÑвинÑа, ÑоÑÑоÑÑие из Ñлоев, оÑажденнÑÑ Ð¿Ñи давлениÑÑ Ð°Ñгоно-киÑлоÑодной газовой ÑмеÑи 4Ðаи 8Ðа. СодеÑжание аÑомов ÑвинÑа в оÑажденнÑÑ ÑлоÑÑ ÑазлиÑалоÑÑ Ð½Ð° 20%. ÐзгоÑавливалиÑÑ ÑÑÑÑкÑÑÑÑ, оÑлиÑаÑÑиеÑÑ Ð¿Ð¾ÑледоваÑелÑноÑÑÑÑ Ð¾ÑÐ°Ð¶Ð´ÐµÐ½Ð¸Ñ Ñлоев. ÐоÑледÑÑÑий вÑÑокоÑемпеÑаÑÑÑнÑй оÑжиг пÑиводил к ÑоÑмиÑÐ¾Ð²Ð°Ð½Ð¸Ñ ÑÐ°Ð·Ñ Ð¿ÐµÑовÑкиÑа в оÑажденнÑÑ ÑÑÑÑкÑÑÑÐ°Ñ . С иÑполÑзованием меÑодов ÑаÑÑÑовой ÑлекÑÑонной микÑоÑкопии и диÑлекÑÑиÑеÑкой диагноÑÑики изÑÑÐµÐ½Ñ Ñазовое ÑоÑÑоÑние, ÑоÑÑав и диÑлекÑÑиÑеÑкие ÑвойÑÑва двÑÑ ÑлойнÑÑ ÑÑÑÑкÑÑÑ. Ðоказано, ÑÑо в завиÑимоÑÑи Ð¾Ñ Ð¾ÑеÑедноÑÑи ÑаÑÐ¿Ð¾Ð»Ð¾Ð¶ÐµÐ½Ð¸Ñ Ñлоев ÑÑÑеÑÑвенно изменÑÑÑÑÑ ÑÑÐ»Ð¾Ð²Ð¸Ñ ÐºÑиÑÑаллизаÑии ÑÐ°Ð·Ñ Ð¿ÐµÑовÑкиÑа, диÑлекÑÑиÑеÑкие паÑамеÑÑÑ Ð¸ ÑниполÑÑнÑе ÑвойÑÑва пленок. The method of radio-frequency magnetron sputtering was used to fabricate thin-film ferroelectric two-layer structures of lead zirconatetitanate, consisting of layers deposited at pressures of an argon-oxygen gas mixture of 4Pa and 8Pa. The content of lead atoms in the deposited layers differed by ~20%. The formed structures differed in the sequence of layers deposition. Subsequenthigh-temperature annealing led to the formation of the perovskite phase in the deposited structures. Using the methods of scanning electron microscopy and dielectric diagnostics, the phase state, compositionand dielectric properties of two-layer structures have been studied. It is shown that, depending on the order of the layers, the crystallization conditions of the perovskite phase, the dielectric parameters, and the unipolar properties of the films changesignificantly. |
| Databáze: | OpenAIRE |
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