High spatial resolution subsurface microscopy

Autor:	Bennett B. Goldberg, M.S. Unlu, S.B. Ippolito
Rok vydání:	2001
Předmět:	Physics Microscope Physics and Astronomy (miscellaneous) business.industry Numerical aperture law.invention Spherical aberration Wavelength Optics Optical microscope law Microscopy Near-field scanning optical microscope business Image resolution
Zdroj:	Applied Physics Letters. 78:4071-4073
ISSN:	1077-3118 0003-6951
Popis:	We present a high-spatial-resolution subsurface microscopy technique that significantly increases the numerical aperture of a microscope without introducing an additional spherical aberration. Consequently, the diffraction-limited spatial resolution is improved beyond the limit of standard subsurface microscopy. By realizing a numerical aperture of 3.4, we experimentally demonstrate a lateral spatial resolution of better than 0.23 μm in subsurface inspection of Si integrated circuits at near infrared wavelengths.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::79f69d56921ebb5de2b3914f81f80dde https://doi.org/10.1063/1.1381574 Zobrazit plný text záznamu