Creation of thin superconducting MoCN thin film by cathode sputtering technique as a basic material for functional cryogenic nanoelements
| Autor: | L. V. Kutuzov, M. M. Dementyeva, K. E. Prikhod’ko, E. D. Olshansky, B. A. Gurovich, B. V. Goncharov |
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| Rok vydání: | 2019 |
| Předmět: | |
| Zdroj: | IOP Conference Series: Materials Science and Engineering. 699:012014 |
| ISSN: | 1757-899X 1757-8981 |
| DOI: | 10.1088/1757-899x/699/1/012014 |
| Popis: | Thin MoCN films were synthesized by a method of cathode sputtering of mosaic Mo-C targets by nitrogen ions at temperature of 800°C on substrates of the oxidized silicon. The temperature dependences of electrical resistance of the films in the range of 4.2–300°K were measured. Volt-ampere characteristics of the films and critical current density vs film thickness were obtained at a temperature of 4.2°K. The microstructure and film-depth chemical composition profiles of thin films were investigated by analytical techniques of the transmission electron microscopy (HRTEM, EELS) on a cross-section samples made by the focused ion beam (FIB). It was established that MoCN thin film at a thickness of 8 nm contained MoC and Mo5N6 layers. The high density of critical current in these films indicated prospects of their application in the field of cryogenic nanotechnologies. |
| Databáze: | OpenAIRE |
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