A micromachined gas sensor based on a catalytic thick film/SnO2 thin film bilayer and a thin film heater
| Autor: | Kunihara Kenji, Suzuki Takuya, Tabata Soichi, Kobayashi Mitsuo, Katsuki Higaki, Hisao Ohnishi |
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| Rok vydání: | 2005 |
| Předmět: |
Materials science
Silicon business.industry Bilayer Metals and Alloys Analytical chemistry chemistry.chemical_element Nitride Condensed Matter Physics Heat capacity Surfaces Coatings and Films Electronic Optical and Magnetic Materials Membrane chemistry Thermal Materials Chemistry Optoelectronics Electrical and Electronic Engineering Thin film business Instrumentation Layer (electronics) |
| Zdroj: | Sensors and Actuators B: Chemical. 109:190-193 |
| ISSN: | 0925-4005 |
| DOI: | 10.1016/j.snb.2005.05.012 |
| Popis: | A micromachined gas sensor based on a catalytic thick film/SnO2 thin film bilayer and a thin film heater was investigated for CO sensing. The sensor demonstrated good sensitivity and high selectivity with low power consumption. The thin film heater and the SnO2 thin film sensing layer were deposited on an Si micromachined structure having a silicon oxide–silicon nitride membrane. On the SnO2 sensing layer, a Pd-Al2O3 catalytic thick film was formed to promote CO detection with a catalyst. The sensor realized low power consumption and fast thermal response owing to small heat capacity. This fast thermal response decreased the time required to detect CO and thus decreased the time to operate the sensor. The average power consumption was less than 0.03 mW when operated every 2 min. The sensor sensitively detected CO by high-and-low periodic operation of the heater, while the sensitivity to H2, the interfering gas used, was relatively suppressed. |
| Databáze: | OpenAIRE |
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