Plasma enhanced chemical vapor deposition of vanadium carbide VC1−xand VOxfrom vanadocene Cp2V

Autor:	Harald Suhr, Johannes Messelhäuser, Wolfgang A. Herrmann, Lutz Deutschmann, Peter Härter
Rok vydání:	1994
Předmět:	Vanadium carbide chemistry.chemical_compound Materials science chemistry Mechanics of Materials Plasma-enhanced chemical vapor deposition Mechanical Engineering Inorganic chemistry General Materials Science Plasma Vanadocene Characterization (materials science)
Zdroj:	Advanced Materials. 6:392-395
ISSN:	0935-9648
DOI:	10.1002/adma.19940060512
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::7972c55db7f0401f266e022b7f718b65 https://doi.org/10.1002/adma.19940060512 Zobrazit plný text záznamu Plný text