Integration of UV-nanoimprint lithography with two-photon polymerization for scalable production

Autor:	Lei Zheng, Axel Günther, Reinhard Caspary, Wolfgang Kowalsky, Bernhard Roth
Rok vydání:	2023
Zdroj:	Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVI.
DOI:	10.1117/12.2648030
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::79659a071f88bdd2bd73692f5399294e https://doi.org/10.1117/12.2648030 Zobrazit plný text záznamu