Organometallic molecules for semiconductor fabrication

Autor:	Deodatta Vinayak Shenai-Khatkhate, J.B. Mullin, A. E. D. Mcqueen, Marjory B. Parker, David J. Cole-Hamilton
Rok vydání:	1990
Předmět:	chemistry.chemical_classification Inorganic chemistry chemistry.chemical_element Halide Adduct purification Adduct Metal chemistry visual_art visual_art.visual_art_medium Molecule lipids (amino acids peptides and proteins) Lewis acids and bases Tellurium Alkyl
Zdroj:	Philosophical Transactions of the Royal Society of London. Series A, Mathematical and Physical Sciences. 330:173-182
ISSN:	2054-0272 0080-4614
Popis:	Adduct purification of metal alkyls for use in metal-organic vapour-phase epitaxy is described and shown to give high purity alkyls of Al, Ga, In, Cd, Zn and Te. In most cases involatile Lewis bases are used to form dissociable adducts, but for tellurium alkyls, halides of mercury or cadmium are used. Alternative source materials such as higher alkyls, volatile adducts and mixed alkyls are discussed and new results on the stability of mixed alkyls of tellurium are presented.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::792d2b5f9fc3a23fcb847bdef56ac483 https://doi.org/10.1098/rsta.1990.0011 Zobrazit plný text záznamu