Design and performance of a new compact adaptable autostigmatic alignment tool
Autor: | William P. Kuhn |
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Rok vydání: | 2016 |
Předmět: | |
Zdroj: | SPIE Proceedings. |
ISSN: | 0277-786X |
DOI: | 10.1117/12.2239213 |
Popis: | The design and performance of a compact, adaptable autostigmatic alignment modulate that can be used as an autocollimator or autostigmatic microscope is described. The new instrument utilizes LED illumination and reticle projection and is compared with a laser diode based point source microscope. Measurement characteristics and practical differences and similarities between the instruments are described. |
Databáze: | OpenAIRE |
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