Application of the optical beam induced current method to the investigation of n-MOS inverters

Autor: U. Stamm, K. Hempel, A. Krause, H. Bergner
Rok vydání: 1992
Předmět:
Zdroj: Microelectronic Engineering. 16:521-528
ISSN: 0167-9317
DOI: 10.1016/0167-9317(92)90375-2
Popis: The influence of a pulsed test beam on the OBIC-signal for time-resolved OBIC-measurement at a picosecond time scale on n-MOS inverters is considered. A simple approach of the mechanism of optical switching of a blocked n-MOS inverter is presented.
Databáze: OpenAIRE