Fabrication Property of Medical Nebulizer Pt Mesh by Using Electron Cyclotron Resonance Ar-ion Milling

Autor:	Myung-Cheon Ahn, Kimin Hong, Purevdorj Khajidmaa, Won-Hyung Lee, Sang-Suk Lee, Cheol-Woo Park, Munkhbat Bolormaa
Rok vydání:	2015
Předmět:	Nebulizer Fabrication business.industry Chemistry law Analytical chemistry General Physics and Astronomy Optoelectronics Ion milling machine Photolithography business Electron cyclotron resonance law.invention
Zdroj:	New Physics: Sae Mulli. 65:1074-1080
ISSN:	2289-0041 0374-4914
DOI:	10.3938/npsm.65.1074
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::78cf4149f59be63f8fdabd2ef61babb2 https://doi.org/10.3938/npsm.65.1074 Zobrazit plný text záznamu