Comparative study on early stages of film growth for transparent conductive oxide films deposited by dc magnetron sputtering
| Autor: | Yasushi Sato, Amica Miyamura, Mikihiro Taketomo, Norihiro Ito, Yuzo Shigesato |
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| Rok vydání: | 2008 |
| Předmět: |
Materials science
business.industry Metals and Alloys Oxide chemistry.chemical_element Mineralogy Surfaces and Interfaces Sputter deposition Tin oxide Surfaces Coatings and Films Electronic Optical and Magnetic Materials chemistry.chemical_compound chemistry Physical vapor deposition Materials Chemistry Optoelectronics Thin film business Sheet resistance Indium Transparent conducting film |
| Zdroj: | Thin Solid Films. 516:4598-4602 |
| ISSN: | 0040-6090 |
| Popis: | Early stages of film growth were investigated on three different kinds of representative transparent conductive oxide films including tin doped indium oxide (ITO), indium zinc oxide (IZO) and gallium doped zinc oxide (GZO) films deposited on unheated alkali free glass substrates by dc magnetron sputtering. The variations in sheet resistance, film coverage and average surface roughness showed clearly that ITO and GZO films possessed Volmer–Weber growth mode. In contrast, the evolution of islands is not clearly observed for IZO film. The nucleation density of IZO film is considered to be much higher than that of ITO and GZO films. |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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