In situmeasurements of surface (photo)voltage of roll-to-roll deposited thin film silicon solar cells
| Autor: | Wim J. J. Soppe, Bas B. Van Aken, Iain Baikie, M. Heijna, Klaas Bakker, Dennis Reid |
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| Rok vydání: | 2010 |
| Předmět: |
Kelvin probe force microscope
Silicon business.industry Chemistry Surface photovoltage Analytical chemistry chemistry.chemical_element Surfaces and Interfaces Condensed Matter Physics Surfaces Coatings and Films Electronic Optical and Magnetic Materials Roll-to-roll processing Plasma-enhanced chemical vapor deposition Materials Chemistry Optoelectronics Work function Electrical and Electronic Engineering Thin film business Layer (electronics) |
| Zdroj: | physica status solidi (a). 207:682-685 |
| ISSN: | 1862-6319 1862-6300 |
| DOI: | 10.1002/pssa.200982741 |
| Popis: | The Kelvin probe is a non-contact, non-destructive vibrating capacitor device that measures the work function difference between a conducting sample and a vibrating tip. This contribution focuses on inline monitoring of the surface (photo)voltage of deposited silicon layers. We apply a custom-built in situ Kelvin probe, operated in a roll-to-roll PECVD system, located immediately after the plasma zones to enable direct feedback to the controlling system of the plasma deposition. The surface photovoltage of nip thin film Si solar cells increases with increasing V oc . The results imply that inline, contactless measurements of the open-circuit voltage are possible and that thus monitoring the doped layer quality during roll-to-roll production is feasible. |
| Databáze: | OpenAIRE |
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