Production and testing of diamond-based pressure sensors
| Autor: | A. A. Altukhov, S. A. L’vov, V. S. Feshchenko, P. G. Nedosekin, S. A. Afanas’ev, E. V. Gladchenkov |
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| Rok vydání: | 2017 |
| Předmět: |
Materials science
Automatic control business.industry Mechanical Engineering Capacitive sensing Electrical engineering Diamond engineering.material Capacitance Pressure sensor Industrial and Manufacturing Engineering Automotive engineering engineering Production (economics) Sensitivity (control systems) Engineering design process business |
| Zdroj: | Russian Engineering Research. 37:638-641 |
| ISSN: | 1934-8088 1068-798X |
| DOI: | 10.3103/s1068798x17070036 |
| Popis: | Automatic control, monitoring, and diagnostic systems are essential to technological progress and the improvement of machine-tool design. In turn, such systems rely on sensors, which collect information regarding mechanical quantities. Such sensors are also subject to the destabilizing physical factors that accompany machine-tool operation. In the present work, a diamond-based pressure sensor is described, and an appropriate manufacturing technology is outlined. Capacitive pressure sensors with a diamond membrane are produced and tested. The sensor characteristics are as follows: capacitance 8 pF; sensitivity 0.38 pF/kPa. |
| Databáze: | OpenAIRE |
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