Manufacturability of Highly Densed Arrays of SC 20% Doped ALN Monolithic PMUT
| Autor: | E. Marigo, Loh Annie, Nor Shazwani, Anis Amiera, Muhammad Nur Azuan, Chan Buan Fei, Mohanraj Soundara-Pandian |
|---|---|
| Rok vydání: | 2021 |
| Předmět: |
Materials science
Aluminium nitride business.industry chemistry.chemical_element 02 engineering and technology 021001 nanoscience & nanotechnology 01 natural sciences Piezoelectricity Design for manufacturability chemistry.chemical_compound chemistry Aluminium 0103 physical sciences PMUT Optoelectronics Ultrasonic sensor Scandium Thin film 010306 general physics 0210 nano-technology business |
| Zdroj: | 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS). |
| DOI: | 10.1109/mems51782.2021.9375371 |
| Popis: | The focus of this paper is to present a comparative study for highly dense arrays of Piezoelectric Micromachined Ultrasonic Transducers (PMUT), manufactured using a Aluminium Nitride (AlN) and emerging Aluminium Scandium Nitride (Al20%ScN) thin films. Monolithic PMUT manufacturing method is used to fabricate the devices. A 100 x 100um array of PMUT, each unit cell has 40μm cavity and the pitch is 57μm, is designed as a test vehicle to monitor the process performance of these two films. |
| Databáze: | OpenAIRE |
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