Fluence and fluence rate effects on electrical conductivity and shrinkage in polyimide bombarded by an ion beam

Autor:	C. Jussiaux, B. Mazière, T. Trigaud, J.P. Moliton
Rok vydání:	1996
Předmět:	Nuclear and High Energy Physics Materials science Ion beam Electrical resistivity and conductivity Analytical chemistry Conductivity Instrumentation Fluence Saturation (magnetic) Polyimide Ion Shrinkage
Zdroj:	Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms. 107:323-326
ISSN:	0168-583X
DOI:	10.1016/0168-583x(95)01022-x
Popis:	When the ion fluence is increasing, a diminishing of the thickness and a rise in electrical conductivity can be simultaneously observed with polyimide films. However, in the 100 keV energy range, a saturation limit appears in both processes. Two experimental processes are presented to increase the conductivity limit (≅ 10−1 S cm−1 with N+ ions), while the shrinkage effect is maintained or even reduced. 1) Multiple irradiations of N+ ions implemented from high to low energies induce tenfold increase in conductivity, and stop the thickness decrease beyond a fluence threshold. 2) Liquid-metal ion sources (LMIS) with Ga+ ions (keV) perform high conductivities (above 300 S cm−1) without notable shirinkage.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::788c75b7af5e12453bf5488a8269e9d1 https://doi.org/10.1016/0168-583x(95)01022-x Zobrazit plný text záznamu Full Text from ScienceDirect