Plasma Polymerization in Direct Current Glow: Characterization of Plasma-Polymerized Films of Benzene and Fluorinated Derivatives

Autor:	Toshihiro Suwa, Masaaki Kakimoto, Yoshio Imai, Mitsutoshi Jikei
Rok vydání:	1995
Předmět:	chemistry.chemical_compound Materials science chemistry Polymerization Direct current Fluorinated derivatives Polymer chemistry Plasma Benzene Photochemistry Plasma polymerization Characterization (materials science)
Zdroj:	ACS Symposium Series ISBN: 9780841233324 Microelectronics Technology: Polymers for Advanced Imaging and Packaging
DOI:	10.1021/bk-1995-0614.ch031
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::786ddf341acfbc92c432f947185697f2 https://doi.org/10.1021/bk-1995-0614.ch031 Zobrazit plný text záznamu