Preliminary study for deposition of Mg2Si thin films with high-power impulse magnetron sputtering
| Autor: | Keita Mukogawa, Hiroharu Sugawara, Mizuki Fujiwara, Tetsushi Matsuoka, Tetsuhide Shimizu, Taiki Yamamoto, Naoto Saito, Tamaki Hattori, Tatsuro Hanahjiri, Shunji Kurosu |
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| Rok vydání: | 2023 |
| Zdroj: | JJAP Conference Proceedings. 10:011003-011003 |
| ISSN: | 2758-2450 |
| DOI: | 10.56646/jjapcp.10.0_011003 |
| Databáze: | OpenAIRE |
| Externí odkaz: |
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