Detection and evaluation of surface defect for large-size grating
| Autor: | Xingxue Li, Bin Zhou, Mengqing Xu, YuDa Chen, Yihan Wang, Jin Wang, Changhe Zhou |
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| Rok vydání: | 2022 |
| Zdroj: | Holography, Diffractive Optics, and Applications XII. |
| DOI: | 10.1117/12.2642142 |
| Databáze: | OpenAIRE |
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