An automated system for detecting systematic defect in memory cell array

Autor:	Jiseong Jeong, Chang-Hun Ko, Seung-Eun Yu, Oh-Hun Kwon, Tae-Hyeong Ku, Tae Heon Kim, Dong-Won Lim, Bo-Tak Lim, Hyuck-Joon Kwon, Jung-Yun Choi, Hyung-Jong Ko
Rok vydání:	2022
Zdroj:	Metrology, Inspection, and Process Control XXXVI.
DOI:	10.1117/12.2605606
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::782290f4bf21e5815b573b4c4ac08a89 https://doi.org/10.1117/12.2605606 Zobrazit plný text záznamu