HARPSS-fabricated nano-gap comb-drive for efficient linear actuation of high frequency BAW resonators
| Autor: | Farrokh Ayazi, Anosh Daruwalla, Haoran Wen, Ramin Mirjalili |
|---|---|
| Rok vydání: | 2016 |
| Předmět: |
010302 applied physics
Fabrication Materials science Force density business.industry 020209 energy Electrical engineering Gyroscope 02 engineering and technology 01 natural sciences law.invention Vibration Resonator Comb drive law 0103 physical sciences 0202 electrical engineering electronic engineering information engineering Optoelectronics business Actuator Voltage |
| Zdroj: | 2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS). |
| DOI: | 10.1109/memsys.2016.7421805 |
| Popis: | This paper presents the design, fabrication and characterization of self-aligned nano-gap comb-drive actuators for high frequency bulk acoustic wave (BAW) resonators. The comb-drive is implemented to actuate a high-Q 1 MHz annulus BAW resonator with gyroscopic modes. Measurements show a linear force density of 261.5 pN/V2μm, which is to the authors' knowledge the largest force density reported to date for silicon comb-drives. As a result, vibration amplitudes as large as 350 nm are measured using relatively small voltages. An equivalent model estimation of the mechanical nonlinearity of the resonator indicates a spring hardening effect at large displacements, which is confirmed by experimental results. |
| Databáze: | OpenAIRE |
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