| Autor: |
I. Charkaborty, J. Z. Wilcox, Roman C. Gutierrez, Tony K. Tang, Wen J. Li, V. Vorperian, R. Bartman, William J. Kaiser, R. Calvet, C.B. Stell |
| Rok vydání: |
1996 |
| Předmět: |
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| Zdroj: |
1996 Solid-State, Actuators, and Microsystems Workshop Technical Digest. |
| DOI: |
10.31438/trf.hh1996.65 |
| Popis: |
This paper reports on design, modeling, fabrication, and characterization of a novel silicon bulk micromachined vibratory rate gyroscope designed for microspacecraft applications. The new microgyroscope consists of a silicon four leaf cloverstructure with a post attached to the center. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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