(Invited) Molecular Layer Deposition of Flexible, Transparent and Conductive Hybrid Organic-Inorganic Thin Films

Autor:	Byoung H. Lee, Byunghoon Yoon, Steven M. George
Rok vydání:	2011
Předmět:	Materials science Alloy chemistry.chemical_element Zinc engineering.material Atomic layer deposition Chemical engineering chemistry engineering Thin film Layer (electronics) Deposition (law) Sheet resistance Transparent conducting film
Zdroj:	ECS Transactions. 41:271-277
ISSN:	1938-6737 1938-5862
Popis:	Hybrid organic-inorganic thin film alloys were fabricated by molecular layer deposition (MLD) and atomic layer deposition (ALD) methods using diethyl zinc (DEZ), hydroquinone (HQ), and water (H2O). Sequential exposures of DEZ & HQ for zincone MLD and DEZ & H2O for ZnO ALD led to the linear growth of zincone alloy films. The alloy film composition could be varied by changing the number of MLD cycles and ALD cycles per reactant sequence. The alloy films were found to be highly conductive. Zincone alloys grown with MLD:ALD cycle ratios of 1:1 and 2:2 displayed sheet resistivities in the 10-3Ω cm range. These sheet resistivities were substantially lower than the sheet resistivity for ZnO ALD films. These alloys films may be useful as flexible, transparent and conducting coatings.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::77f3d1f24373b91c640dafe44af0cfe8 https://doi.org/10.1149/1.3633677 Zobrazit plný text záznamu