Defect Diagnostic Matrix -a Defect Learning Vehicle For Submicron Technologies

Autor: E.J. Sprogis, R.E. Newhart
Rok vydání: 2005
Předmět:
Zdroj: Proceedings of the IEEE International Conference on Microelectronic Test Structures.
DOI: 10.1109/icmts.1988.672943
Popis: This paper describes a defect monitoring test site that allows rapid isolation and identification of VLSI processing defects using functional test bit maps and pattern recognition programs. Some structural parts may be tested in-line.
Databáze: OpenAIRE