Defect Diagnostic Matrix -a Defect Learning Vehicle For Submicron Technologies
Autor: | E.J. Sprogis, R.E. Newhart |
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Rok vydání: | 2005 |
Předmět: | |
Zdroj: | Proceedings of the IEEE International Conference on Microelectronic Test Structures. |
DOI: | 10.1109/icmts.1988.672943 |
Popis: | This paper describes a defect monitoring test site that allows rapid isolation and identification of VLSI processing defects using functional test bit maps and pattern recognition programs. Some structural parts may be tested in-line. |
Databáze: | OpenAIRE |
Externí odkaz: |