A comparative study of self-heating effects in 3nm node GAAFETs and FinFETs

Autor: Pan Zhao, Song-Han Zhao, Yan-Dong He, Gang Du
Rok vydání: 2022
Zdroj: 2022 IEEE 16th International Conference on Solid-State & Integrated Circuit Technology (ICSICT).
DOI: 10.1109/icsict55466.2022.9963426
Databáze: OpenAIRE