| Autor: |
Thorsten Balslink, Yiannos Manoli, Burkhard Kuhlmann, Jan-Timo Liewald |
| Rok vydání: |
2012 |
| Předmět: |
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| Zdroj: |
2012 IEEE 25th International Conference on Micro Electro Mechanical Systems (MEMS). |
| DOI: |
10.1109/memsys.2012.6170245 |
| Popis: |
The working frequency f 0 of vibratory MEMS angular rate sensors is a main optimization parameter. To investigate the specific challenges of increasing f 0 we designed a new device with f 0 =100 kHz. Key parameters of the 100 kHz device are theoretically and experimentally compared with those of a 15 kHz reference sensor. The experimental results show the validity of the theoretical frequency scaling of the key parameters. The measurements show benefits and disadvantages of MEMS vibratory gyroscopes with increased f 0 >>30 kHz. |
| Databáze: |
OpenAIRE |
| Externí odkaz: |
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