| Popis: |
In this chapter, a number of materials that are sputter deposited to form thin films for flat panel displays, in particular active matrix liquid crystal displays (AMLCDs) and photovoltaic solar cell modules are reviewed. Considering technology trends, for individual sputtering target, target manufacturing steps and thin films properties have been reviewed. Essentials of aluminum, aluminum-neodymium (Al-Nd), molybdenum, chromium, indium tin oxide (ITO), aluminum-doped zinc oxide (AZO), CIS, CIGS and CZTS have been discussed in light of sputtering target making and thin film deposition. |
