Various Fatigue Testing of Polysilicon Microcantilever Beam in Bending

Autor:	Jeng-Nan Hung, Hong Hocheng
Rok vydání:	2007
Předmět:	Stress (mechanics) Microactuator Materials science Cantilever Fatigue testing Bending Composite material Piezoelectricity Beam (structure)
Zdroj:	2007 Digest of papers Microprocesses and Nanotechnology.
Popis:	In this study, the polysilicon microcantilever beams are successfully fabricated and fully suspended. The results of fatigue life in bending are obtained by both microactuator testing method, MTS testing machine and piezoelectric system. The experimental data shows that the larger stress reduces the fatigue life.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::779d25b12090e9a1c45579a5e95d1b32 https://doi.org/10.1109/imnc.2007.4456251 Zobrazit plný text záznamu