Recent Advances in Thermal Processing for c-Si Solar Cell Manufacturing

Autor:	Xu Zheng, Yan Guo, Tianming Bao, Frank Bottari, Lihua Li
Rok vydání:	2010
Předmět:	Materials science law Thermal Solar cell Engineering physics law.invention
Zdroj:	ECS Transactions. 27:995-1000
ISSN:	1938-6737 1938-5862
DOI:	10.1149/1.3360741
Popis:	Thermal processing is an integral part of crystalline silicon (c-Si) solar cell manufacturing technology. It is often applied to achieve diffusion, annealing, oxidation, deposition, or reaction process steps in a production environment. This paper reports recent developments in thermal process technology that enable the industry to improve cell efficiency and manufacturing productivity for the standard c-Si cell technology. Especially, continuous inline thermal equipment is adopted in many critical c-Si cell fabrication stages, from emitter formation by dopant diffusion, contact formation by rapid thermal sintering of metallic pastes, to hydrogen annealing to rescue low-efficiency cells.
Databáze:	OpenAIRE
Externí odkaz:	https://explore.openaire.eu/search/publication?articleId=doi_________::77986797740f5ed149f0a00fff503480 https://doi.org/10.1149/1.3360741 Zobrazit plný text záznamu