Selective Deposition of a Cross-Linked Low-Permittivity Polycarbosilane on Copper

Autor: Amit Singh, J.Y. Hyun, Ganpati Ramanath, Zhizhong Wu, Darshan Gandhi, Binay Singh, Leonard V. Interrante
Rok vydání: 2010
Předmět:
Zdroj: ACS Applied Materials & Interfaces. 2:2180-2184
ISSN: 1944-8252
1944-8244
DOI: 10.1021/am100441t
Popis: Differential scanning calorimetry studies of the reaction of a cyclolinear polycarbosilane [cyclo-(CH3Si(CH2)2SiCH3)-(CH2)6]n on air-exposed Cu surfaces reveal a substantial enhancement of the cros...
Databáze: OpenAIRE