Selective Deposition of a Cross-Linked Low-Permittivity Polycarbosilane on Copper
Autor: | Amit Singh, J.Y. Hyun, Ganpati Ramanath, Zhizhong Wu, Darshan Gandhi, Binay Singh, Leonard V. Interrante |
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Rok vydání: | 2010 |
Předmět: | |
Zdroj: | ACS Applied Materials & Interfaces. 2:2180-2184 |
ISSN: | 1944-8252 1944-8244 |
DOI: | 10.1021/am100441t |
Popis: | Differential scanning calorimetry studies of the reaction of a cyclolinear polycarbosilane [cyclo-(CH3Si(CH2)2SiCH3)-(CH2)6]n on air-exposed Cu surfaces reveal a substantial enhancement of the cros... |
Databáze: | OpenAIRE |
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