Vibration-desensitized fiber-diffraction interferometer for industrial surface measurements
| Autor: | Joonho You, Js Park Jeong-Sik Park, Seung-Woo Kim |
|---|---|
| Rok vydání: | 2009 |
| Předmět: |
Wavefront
Engineering business.product_category business.industry Mechanical Engineering Astrophysics::Instrumentation and Methods for Astrophysics Vibration control Industrial and Manufacturing Engineering law.invention Vibration Interferometry Optics Vibration isolation Surface metrology law business Waveguide Digital camera |
| Zdroj: | CIRP Annals. 58:473-476 |
| ISSN: | 0007-8506 |
| DOI: | 10.1016/j.cirp.2009.03.006 |
| Popis: | We describe an industrial interferometer designed to conduct high-precision surface measurements in the presence of severe vibration. The principle of common-path interferometry is realized by devising a single-mode fiber waveguide that generates the reference wave directly from the measurement wave, enabling removal of the temporal wavefront fluctuation caused by vibration. In addition, a continuous-scanning phase-measuring method is adopted to isolate spurious vibration residuals in interferometric fringes captured using a high-speed digital camera. Experimental tests prove that the proposed interferometer is suited for in-line measurements of large mirrors, silicon wafers, and flat display panels with no excessive ground isolation for anti-vibration. |
| Databáze: | OpenAIRE |
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