Hybrid optical modulator based on surface acoustic waves fabricated using imprint lithography and the epitaxial lift-off technique

Autor: Yukihiko Takagaki, M. Ramsteiner, E. Wiebicke, Rudolf Hey, A. Riedel, H. Kostial, K. H. Ploog
Rok vydání: 2003
Předmět:
Zdroj: Semiconductor Science and Technology. 18:807-811
ISSN: 1361-6641
0268-1242
Popis: We utilize imprint lithography and the epitaxial lift-off technique to fabricate devices in which the photoluminescence (PL) is modulated under irradiation of surface acoustic waves (SAWs). Imprint lithography provides short-wavelength SAW transducers on LiNbO3. A high-quality GaAs–(Al,Ga)As quantum well is bonded in front of the transducers using the epitaxial lift-off technique. The large electromechanical coupling in LiNbO3 enables us to manipulate the carrier dynamics in the quantum well through the SAW-induced piezoelectric fields far more effectively than with transducers prepared directly on GaAs. The influences of the scattering of the SAWs from imperfections in the bonded film are investigated by measuring the quenching of the quantum-well emission by micro-PL.
Databáze: OpenAIRE