Negative photoconductivity in sulfur-hyperdoped silicon film

Autor: Xiaohong Li, Liu Dexiong, Sifu Hu, Yanlei Hu, C. Wen, Xiaoming Lin, Guoqiang Li, Yanbin Zhang, Yong Cai, Kai Wang
Rok vydání: 2019
Předmět:
Zdroj: Materials Science in Semiconductor Processing. 98:106-112
ISSN: 1369-8001
DOI: 10.1016/j.mssp.2019.04.002
Popis: We report a negative photoconductivity effect in sulfur-hyperdoped silicon film under near-ultraviolet light illumination. A weak incident ultraviolet light can cause a significant increase in the sheet resistance of the film, and the most sensitive sample observed has the maximum increment of 817%. In addition, the amplitude of this negative photoconductivity decreases with the time of thermal annealing treatment. The negative photoconductivity of sulfur-hyperdoped silicon film is related to light-induced defects which act as recombination center in the bandgap.
Databáze: OpenAIRE