RF-MEMS Switched Capacitor using Ta/Ta2O5 Electrodes
| Autor: | Jean-Christophe Orlianges, Clement Hallepee, Mariem Laouini, Pierre Blondy |
|---|---|
| Rok vydání: | 2020 |
| Předmět: |
010302 applied physics
Permittivity Fabrication Materials science business.industry 020208 electrical & electronic engineering Biasing 02 engineering and technology Dielectric Switched capacitor 01 natural sciences Capacitance law.invention Capacitor law 0103 physical sciences Electrode 0202 electrical engineering electronic engineering information engineering Optoelectronics business |
| Zdroj: | 2020 IEEE/MTT-S International Microwave Symposium (IMS). |
| Popis: | This paper presents the fabrication and measurements of RF-MEMS, zero-level packaged switched capacitors. Crystallized Ta/Ta 2 O 5 electrodes are used for electrostatic actuation. The electrode formation is conducted in a single deposition step, providing a very good metal (Ta) to dielectric (Ta 2 O 5 ) interface. The 60×50 µm MEMS capacitor can be switched from 50 fF to 350 fF, by applying a 15 V unipolar bias voltage. 8-hours hold-down testing have shown the absence of charging. The high permittivity of Ta 2 O 5 also increases 5 times the capacitance value compared to SiN-based switched MEMS capacitors with the same surface. |
| Databáze: | OpenAIRE |
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